Table of Contents

Table of Contents

Preface
pp. vii-xi

Chapter 1
Vibration Sensitivity Assessment for Coherence Scanning Interferometry
(John R. Troutman, Chris J. Evans and Tony L. Schmitz, Center for Precision Metrology, University of North Carolina at Charlotte, Charlotte, NC, USA)
pp. 1-14

Chapter 2
Permeability Engineering of Semiconductor Photonic Devices
(Tomohiro Amemiya, Toru Kanazawa, Atsushi Ishikawa, Nobuhiko Nishiyama, Yasuyuki Miyamoto, Takuo Tanaka, and Shigehisa Arai, Quantum Nanoelectronics Research Center, Tokyo Institute of Technology, Tokyo, Japan, and others)
pp. 15-36

Chapter 3
Interferometric Structures for Optical Interleaving
(Juan Zhang, School of Communication and Information Engineering, Shanghai University, Shanghai, China)
pp. 37-86

Chapter 4
Optical Interference Lithography
(Peng Xie, Rochester Institute of Technology, NY, USA)
pp. 87-124

Chapter 5
Laser Surface Patterning using a Modified Michelson Interferometer and Femtosecond Laser Radiation
(V. Oliveira and R. Vilar, Instituto Superior de Engenharia de Lisboa, Instituto Politécnico de Lisboa, Lisboa, Portugal, and others)
pp. 125-146

Chapter 6
Optical MEMS Interferometers
(Yasser M. Sabry, Diaa Khalil and Tarik Bourouina, Electronics and Communication Engineering Department, Faculty of Engineering, Ain-Shams University, Cairo, Egypt, and others)
pp. 147-172

Chapter 7
A Simple Two-Ray Interferometer Tuned by Rotation
(Sergey L. Mikerin, and Vladimir D. Ugozhaev, Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russian Federation)
pp. 173-182

Chapter 8
Tuning of Interference Pattern Period by Rotation of Interferometer Itself
(Sergey L. Mikerin and Vladimir D. Ugozhaev, Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russian Federation)
pp. 183-198

Chapter 9
A Rotational Tuning of Convergence Angle in a Two-Ray Interferometer with Fixed Mirrors
(Sergey L. Mikerin, and Vladimir D. Ugozhaev, Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russian Federation)
pp. 199-210

Chapter 10
Detection of Acoustic Fields from Bounded Ultrasonic Beams by Using Laser Interferometry Technique
(Yulia V. Korkh, Dmitry V. Perov, Anatoly B. Rinkevich, M.N. Miheev Institute of Metal Physics of Ural Branch of Russian Academy of Sciences, Sofia Kovalevskaya St., Ekaterinburg, Russia)
pp. 211-252

Chapter 11
Shearing Interferometers with a Singular Source of Light
(Khoroshun Anna, Ass. Professor, Physics and Electronics Department, East-Ukrainian National University named after Volodymyr Dahl, Pr. Radyansky, Severodonetsk, Ukraine)
pp. 253-268

Index
pp. 269-277