Table of Contents
Table of Contents
Preface
List of Abbreviations
List of Important Symbols
Introduction
Part 1. BPSG Thin Film Deposition
Chapter 1 – Brief Historical Overview of BPSG Thin Film Research (pp. 3-8)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 2 – Basic BPSG Film CVD Tools and Methodology (pp. 9-16)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 3 – Basic BPSG CVD Kinetic Features (pp. 17-32)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 4 – As-Deposited BPSG Film Step Coverage and Gap-Fill (pp. 33-40)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 5 – Glass Film CVD Schemes (pp. 41-46)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 6 – BPSG Film Industrial CVD Technology (pp. 47-50)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Part 2. BPSG Film Composition, Structure, and Properties
Chapter 7 – Brief Review on BPSG Thin Film Analysis Techniques (pp. 53-64)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 8 – BPSG Film Composition (pp. 65-70)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 9 – BPSG Film Structure (pp. 71-78)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 10 – Basic BPSG Film Properties (pp. 79-94)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 11 – BPSG Film Flow Capability (pp. 95-100)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 12 – BPSG Film – Ambient Moisture Interaction (pp. 101-120)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 13 – Defect Formation Phenomenon in BPSG Films (pp. 121-152)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 14 – Interrelation of BPSG Film Deposition, Composition, Structure, and Properties (pp. 153-162)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Part 3. BPSG Film Implementation in Electronics
Chapter 15 – Thermally Induced BPSG Film Viscous Flow On Stepped IC Device Structures (pp. 165-196)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 16 – BPSG Film Composition Optimization (pp. 197-200)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 17 – BPSG Film Durability (pp. 201-206)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Chapter 18 – BPSG Films in Electronic Technologies (pp. 207-216)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available
Conclusion
Acknowledgements
References
Author Biography
Index
