Borophosphosilicate Glass Thin Films in Electronics

Vladislav Yu. Vasilyev, PhD
Novosibirsk State Technical University and SibIS LLC, Russian Federation

Series: Materials Science and Technologies, Electronics and Telecommunications Research
BISAC: TEC021000

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$209.00

Volume 10

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Special issue: Resilience in breaking the cycle of children’s environmental health disparities
Edited by I Leslie Rubin, Robert J Geller, Abby Mutic, Benjamin A Gitterman, Nathan Mutic, Wayne Garfinkel, Claire D Coles, Kurt Martinuzzi, and Joav Merrick

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This comprehensive monograph summarizes the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterization, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapor deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description of BPSG film properties, film structure, glass flow capability, BPSG film-moisture interaction and the film defect formation phenomenon. A number of experimental data are presented and discussed in detail. (Imprint: Nova)

Preface

List of Abbreviations

List of Important Symbols

Introduction

Part 1. BPSG Thin Film Deposition

Chapter 1 - Brief Historical Overview of BPSG Thin Film Research (pp. 3-8)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 2 - Basic BPSG Film CVD Tools and Methodology (pp. 9-16)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 3 - Basic BPSG CVD Kinetic Features (pp. 17-32)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 4 - As-Deposited BPSG Film Step Coverage and Gap-Fill (pp. 33-40)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 5 - Glass Film CVD Schemes (pp. 41-46)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 6 - BPSG Film Industrial CVD Technology (pp. 47-50)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Part 2. BPSG Film Composition, Structure, and Properties

Chapter 7 - Brief Review on BPSG Thin Film Analysis Techniques (pp. 53-64)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 8 - BPSG Film Composition (pp. 65-70)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 9 - BPSG Film Structure (pp. 71-78)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 10 - Basic BPSG Film Properties (pp. 79-94)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 11 - BPSG Film Flow Capability (pp. 95-100)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 12 - BPSG Film – Ambient Moisture Interaction (pp. 101-120)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 13 - Defect Formation Phenomenon in BPSG Films (pp. 121-152)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 14 - Interrelation of BPSG Film Deposition, Composition, Structure, and Properties (pp. 153-162)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Part 3. BPSG Film Implementation in Electronics

Chapter 15 - Thermally Induced BPSG Film Viscous Flow On Stepped IC Device Structures (pp. 165-196)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 16 - BPSG Film Composition Optimization (pp. 197-200)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 17 - BPSG Film Durability (pp. 201-206)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Chapter 18 - BPSG Films in Electronic Technologies (pp. 207-216)
Authors / Editors: Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering and Electronics Faculty, Novosibirsk State Technical University, and SibIS LLC, Novosibirsk, Russia)
Free Download Available

Conclusion

Acknowledgements

References

Author Biography

Index

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