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Mukti M. Rana and Donald P. Butler
Delaware State University, USA, and others
Series: Physics Research and Technology
BISAC: SCI055000
Uncooled infrared detectors or microbolometers are the thermal detectors whose resistance changes when infrared radiation falls onto it. Radio Frequency (RF) sputtered thin films of GexSi1-x and GexSi1-xOy have the property of changing their resistance by the heating produced when the infrared radiation falls on top of them. The thin films of GexSi1-x and GexSi1-xOy deposited by RF magnetron sputtering at room temperature from a single target of GexSi1-x in Ar or Ar : O2 environment result in a temperature coefficient of resistance (TCR) of ~5%/K at room temperature with moderate resistivity. The variations of silicon and oxygen concentrations in GexSi1-xOy thin films provide the opportunity for a parametric investigation of the dependence of the electrical and optical characteristics of the thin films on composition. (Imprint: Nova)
Table of Contents
ABSTRACT
I. INTRODUCTION
II. THIN FILM DEPOSITION
III. PROPERTIES OF GEXSI1-X AND GEXSI1-XOY THIN FILM
IV. APPLICATIONS OF RF SPUTTERED GEXSI1-X AND GEXSI1-XOY FILMS: MICROBOLOMETER FABRICATION
V. BOLOMETER CHARACTERIZATION
VI. PERFORMANCE OF MICROBOLOMETER
VII. NOISE REDUCTION OF A-GEXSI1-XOY MICROBOLOMETER BY FORMING GAS PASSIVATION
VIII. EXPERIMENTAL DETAILS FOR FROMING GAS PASSIVATION
IX. RESULTS OF FORMING GAS PASSIVATION
IX. CONCLUSION
REFERENCES
INDEX
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