S. M. Afonin, PhD – National Research University of Electronic Technology (Moscow Institute of Electronic Technology MIET), Moscow, Russia

Part of the book: Advances in Nanotechnology. Volume 29
Chapter DOI: https://doi.org/10.52305/JQHI2740

Abstract

In this chapter, a piezoelectric actuator with coded control is investigated for use in nanoresearch. A piezoelectric actuator with coded control is employed in nanotechnology, adaptive optics, astronomy, and nanobiomedicine. The mechanical and adjustment characteristics of a piezoelectric actuator with coded control are obtained. The transfer functions of a piezoelectric actuator are investigated. The transient characteristics of a piezoelectric actuator are used in nanotechnology. The mechanical and adjustment characteristics of a piezoelectric actuator with coded control are considered using the equations of piezoelectric effect and mechanical load. The transfer functions of a piezoelectric actuator with coded control are determined at elastic inertial load. The transient characteristics of a piezoelectric actuator are transferred using the rigidity and the mass of a load. The deformations of a piezoelectric actuator with coded control are obtained for longitudinal, transverse, ands hift piezoelectric effects.

Keywords: piezoelectric actuator, coded control, deformation, mechanical and adjustment characteristics, transfer function, transient characteristic, nanotechnology.

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